Mass flow controllers
Regulate with precision
Products: Mass flow controller
Mass Flow Controller EMF 100
Ultra-compact mass flow controller with SMA valve technology for flow rates up to 0.1 l/min. Onlyone
variant is available online.Configurable parameters:
Flow rangeMass Flow Controller MFC4000
Ultra-compact mass flow controller with Staiger valve technology for maximum flow rates from 0.2 l/min to 1 l/min. There are6
variants available online.Configurable parameters:
Flow range CommunicationMass Flow Controller SFC6000D
Compact mass flow controller with Staiger valve technology for maximum flow rates from 5 l/min to 50 l/min. There are3
variants available online.Configurable parameters:
Flow rangeMass Flow Controller VEMD
Dynamic mass flow controller for maximum flow rates from 100 l/min to 200 l/min. There are4
variants available online.Configurable parameters:
Flow range Display