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Mass Flow Controller
Dynamic and precise gas control

High Precision Flow Control

Enables accurate and stable gas dosing by continuously adjusting flow in real time, ensuring consistent mass flow independent of pressure and temperature variations in demanding and sensitive applications.

Fast Dynamic Response

Proportional valve technology allows rapid adjustment of flow rates, enabling the system to react instantly to changing conditions and maintain precise control in dynamic and time-critical processes.

Excellent Repeatability

Ensures consistent and reproducible flow performance across multiple cycles, supporting reliable operation in applications where precision and consistency are critical for process quality and system performance.

Compact & OEM Integration

Designed for easy integration into space-constrained systems, reducing overall system complexity while enabling flexible and efficient implementation in modern OEM applications requiring high-performance gas flow control.

 Mass flow controller

 

 

A mass flow controller (MFC) is designed to measure and regulate the mass flow of gases in a system, independent of external influences such as pressure and temperature. This makes it significantly more stable and precise compared to conventional volumetric flow control methods.

An MFC operates in a closed-loop control system, where a sensor continuously measures the actual gas flow and compares it with the desired setpoint. Based on this comparison, the system actively adjusts the flow in real time.

Staiger proportional valves enable precise, dynamic, and reliable flow control, supporting high-performance MFC designs in demanding applications.

Staiger Proportional valves

 

Mass Flow Controllers – Configure and Order Now!

Echo_MFC_EMF 100
Mass Flow Controller EMF 100
Ultra-compact mass flow controller with SMA valve technology for flow rates up to 0.1 l/min.
MFC4000B
Mass Flow Controller MFC4000
Ultra-compact mass flow controller with Staiger valve technology for maximum flow rates from 0.2 l/min to 1 l/min....
SFC6000D_cut
Mass Flow Controller SFC6000D
Compact mass flow controller with Staiger valve technology for maximum flow rates from 5 l/min to 50 l/min.
35588r_cut2
Mass Flow Controller VEMD
Dynamic mass flow controller for maximum flow rates from 100 l/min to 200 l/min.

Good to Know! 

What is a Mass Flow Controller?

A mass flow controller (MFC) is a device used to measure and control the mass flow of gases in a system. Unlike volumetric flow control, which depends on pressure and temperature, an MFC ensures that the actual amount of gas (mass) remains constant, even when operating conditions change.

This makes mass flow controllers essential in applications where precision, consistency, and process stability are critical. By maintaining a constant mass flow, MFCs ensure that the correct quantity of gas is delivered regardless of fluctuations in pressure, temperature, or system conditions.

As a result, MFCs are widely used in industries that require accurate gas dosing, repeatable processes, and reliable performance. 

How Does a Mass Flow Controller Work?

A mass flow controller operates as a closed-loop control system, continuously measuring and adjusting the gas flow to match a defined setpoint.

The system consists of three main elements: a flow sensor, control electronics, and a proportional control valve.

First, the sensor measures the actual gas flow in real time using a defined measuring principle (e.g. thermal or pressure-based). This measured value is transmitted to the control electronics, where it is continuously compared with the desired setpoint.

If a deviation is detected, the controller immediately adjusts the proportional valve. By opening or closing the valve accordingly, the system regulates the gas flow until the setpoint is reached and maintained.

This continuous feedback loop enables precise, stable, and dynamic control of gas flow, even under changing operating conditions such as pressure or temperature variations.

The performance of this control process depends strongly on the response time and accuracy of the proportional valve, as it directly determines how quickly and precisely the system can react to changes.

What is the role of Staiger proportional valve in mass flow controller?

The proportional valve is the key control element in a mass flow controller. It acts as the final actuator in the control loop, directly regulating the gas flow based on signals from the control electronics.

Its function is to continuously adjust the valve opening in response to deviations between the actual flow and the desired setpoint. This enables smooth, dynamic, and precise control of the gas flow, rather than simple on/off regulation.

The overall performance of a mass flow controller, such as accuracy, response time, and stability – is largely determined by the behavior of the proportional valve. A fast and precise valve allows the system to react quickly to changes and maintain stable operating conditions.

Staiger proportional valves are specifically designed to meet these requirements, enabling:

  • Fast and dynamic response for real-time flow adjustments
  • High precision and repeatability for consistent results
  • Stable control behavior even in demanding applications
  • Compact integration into space-constrained OEM systems

By combining precise control characteristics with reliable performance, Staiger proportional valves support the development of high-performance mass flow controllers for modern gas control applications.

Application Areas 

Mass flow controllers are used in applications where precise, stable, and repeatable gas control is essential. Their ability to maintain consistent flow independent of pressure and temperature makes them a key component in many industries. 

  • Medical & Life Science
    Precise control of oxygen and medical gases in devices such as ventilators, anesthesia systems, and laboratory equipment.
  • Analytical & Laboratory
    Instrumentation Accurate gas flow regulation in systems like gas chromatography, spectroscopy, and diagnostic analyzers, ensuring reliable and reproducible results.
  • Semiconductor & Research
    High-precision control of process gases in sensitive environments, where even small deviations can impact product quality and process stability.
  • Industrial Automation
    Controlled gas dosing and flow regulation in automated processes, supporting efficiency, consistency, and process optimization.
  • OEM & Customized Systems
    Ideal for integration into compact, application-specific systems that require precise gas control, fast response, and flexible design.

Ready to Optimize Your Mass Flow Control System?

Whether you are developing a new mass flow controller or optimizing an existing system, the right valve technology makes the difference.

👉 Contact our team to find the right proportional valve solution for your application.

 

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